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LDS不断供化学品供应系统
| Item | Description |
|---|---|
| Model |
TCSS-300H Ex |
| Refill method |
Refill from BCSS to TCSS |
| Equipment size |
1200(W) x 880(D) x 2,250(H) |
| Supply line |
3~12 Stick |
| Residual volume management |
Weight Scale, Canister Level Sensor |
| Applied gas |
TEOS, TEB, TEPO, etc |
| Storage capacity |
14L, 3.7GALLON (Bulk 14L, Process 14L) |
| Item | Description |
|---|---|
| Model |
BCSS II 200L Ex (MASTER & SLAVE) |
| Refill method |
Bulk Master, Slave Auto Cross Over Supply |
| Equipment size |
900(W) x 1,070(D) x 2,380(H) |
| Supply line |
Maximum 9 Stick |
| Residual volume management |
Weight Scale, Canister Level Sensor |
| Applied gas |
TEOS, TEB, TEPO, etc |
| Storage capacity |
200L |
| Item | Description |
|---|---|
| Model |
LCSS-200HD Ex |
| Refill method |
Bulk to Process |
| Equipment size |
600(W) x 870(D) x 2,100(H) |
| Supply line |
Maximum 4 Stick |
| Residual volume management |
Weight Scale, Canister Level Sensor |
| Applied gas |
TiCl4, TDMAT, BPSG, OMCTS, DEMS, 4MS, 2NTE, Cyclohexane, MDEOS, ATRP, AM31,DiPAS |
| Storage capacity |
19L, 5GALLON (Bulk 19L, Process 19L) / 14L, 3.7GALLON (Bulk 14L, Process 14L) |